|発明の名称||CHARGED CORPUSCULAR BEAM IRRADIATOR AND ROTARY GANTRY|
PROBLEM TO BE SOLVED: To miniaturize the whole device, by omitting any one electromagnet of a wobbler electromagnet in the X direction and a wobbler electromagnet in the Y direction.
SOLUTION: A charged corpuscular beam 2 incident in a final deflection electromagnet 7 via four-pole electromagnets 4, 5 and 6, is scanned by including an X directional component, while advancing in a circular arc shape in the final deflection electromagnet 7, by increasing and decreasing a deflection electromagnetic field generated in the final deflection electromagnet 7, for example, with a specific period. The charged corpuscular beam 2 scanned by including the X directional component, is scanned by including an Y directional component while passing through the wobbler electromagnet 8 in the Y direction. Thus, the charged corpuscular beam 2 is scanned by including the X directional component and the Y directional component, and is irradiated so as to, for example, draw a circle to a target 9.
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