|発明の名称||EXTREME ULTRAVIOLET LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT GENERATING METHOD|
PROBLEM TO BE SOLVED: To simply control plasma temperature and density to thereby increase luminous efficiency.
SOLUTION: An extreme ultraviolet light source (1) includes: a laser light source (6) for irradiating a laser beam (6a); and a target material (T) that is excited by being irradiated with the laser light (6a) from the laser light source (6) to generate plasma and irradiate extreme ultraviolet light, is a multicomponent target material, and includes at least a first element and a second element which includes a spectrum component in which spectrum strength of spectrum distribution of the first element is strongest in a region of wavelength of 200 nm or less, and which also has a spectrum distribution with a full width at half maximum wider than the full width at half maximum of a waveform of spectrum distribution in the strongest spectrum component.
- 国立大学法人宮崎大学 産学・地域連携センター知的財産部門
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