|発明の名称||METHOD OF SUPPRESSING/CONTROLLING VIBRATION OF PNEUMATIC VIBRATION ELIMINATION BASE SYSTEM|
PROBLEM TO BE SOLVED: To provide a method of suppressing/controlling vibration of a pneumatic vibration elimination base system suitable for rapidly suppressing vibration of large displacement, for instance, vibration at a level of several millimeters by active control.
SOLUTION: This pneumatic vibration elimination base system controls vibration of a vibration elimination base by controlling a flow rate to an air spring by a multiple-valued quantization flow rate specified by on-off operation of a plurality of on-off valves. Since a pipe arrangement is used in pneumatic control, dead time is eliminated by state prediction control (F). By considering the on-off control of the on-off valve, an FBM (feedback member) is added to a control system, a dead zone function Ψ and a saturation function Γ are added to the prior stage of the FBM, and a dead zone compensator H is added to the dead zone function Ψ. Large vibration at a level of several millimeters can be rapidly suppressed as compared with a conventional mechanism, and control by the on-off drive of the on-off valve excels in high-speed responsiveness as compared with linear control using a servo valve and can be inexpensively achieved.
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