|発明の名称||CONTROL DEVICE, ATOMIC FORCE MICROSCOPE, CONTROL METHOD, AND PROGRAM|
PROBLEM TO BE SOLVED: To provide a control device, an atomic force microscope, a control method and a control program allowing a vibrator and a sample to approach correctly to a distance where an atomic force acts, without finalizing the approach action by fluctuations even when there are fluctuations in variable frequency of the vibrator due to distance, lapse time or atmospheric temperature, while avoiding the situation where a short range force more than a predetermined value acts between a probe and the sample.
SOLUTION: A coarse adjustment mechanism control part 153 instructs a coarse adjustment mechanism part 20 to start the movement of a sample 2 in a direction close to a probe 12, and thereafter, whenever predetermined conditions are satisfied, resets a set point value at a value obtained by adding a predetermined offset frequency to the variable frequency Δf shown by an electric signal from a frequency detecting device 10 at the time when predetermined conditions are satisfied. When the variable frequency Δf reaches a value beyond the set point value, the coarse adjustment mechanism control part controls the coarse adjustment mechanism part 20 to stop the movement of the sample 2.
- 国立大学法人京都大学 産官学連携本部
- URL: https://www.saci.kyoto-u.ac.jp/
- Address: 〒606-8501 京都府京都市左京区吉田本町
- TEL: 075-753-9181
- FAX: 075-753-7591