PROBLEM TO BE SOLVED: To estimate void formation and burnout fault by numerical simulation using EM damage control parameters of metal wiring.
SOLUTION: In a numerical simulation, metal wiring is divided into elements. The distribution of current density and temperature is obtained through numerical analysis (S304). An atomic flux divergence AFDgen of each element is calculated by using the distribution and the constant (S306) of the physical property of a material being determined by an acceleration test in advance (S308). Volume reduction (S312) per calculation step in the simulation is given by multiplying the volume of each element, time corresponding to one calculation step, and atomic volume corresponding to the calculated AFDgen (S310). Based on the amount of reduction for the volume, the thickness of each element is reduced (S314). In the element where the thickness has been reduced, that a void is formed is indicated. Numerical analysis of the current density and temperature distribution in the metal wiring is performed again, while taking the thickness of each element into consideration (S304). Then calculation is repeated.