|発明の名称||SENSOR PART AND BIOSENSOR|
PROBLEM TO BE SOLVED: To provide a super-micro biosensor and a sensor part reducing cost and attaining high reliability by miniaturizing and reducing assembling and manufacturing processes of individual components for responding to the requirement to the further miniaturization.
SOLUTION: A light emitting part 21 and a light receiving part 22 are disposed in the same recessed part 24 formed in a semiconductor substrate surface 23 and the upper side of the semiconductor substrate 23 is disposed with a light-shielding cover substrate 27 having first light guiding parts 25 and second light guiding parts 26. The light receiving part 22 is formed of arrayed light receiving elements 28, so that the second light guiding parts 26 is the same as the light receiving elements 28 in number are provided in the light-shielding cover substrate 27 and the light receiving surfaces of the light receiving elements 28 are so connected as to fit with respective one ends of the second light guiding parts 26 without any clearance.
- 国立大学法人九州大学 学術研究・産学官連携本部
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