|発明の名称||FLAT SURFACE SQUID SENSOR|
PROBLEM TO BE SOLVED: To provide a flat surface SQUID sensor with less damage due to a thermal cycle, to which an external connection cable can be soldered.
SOLUTION: A copper terminal (2) for external connection soldering, a copper terminal (3) for detection coil pad, and a copper terminal (2a) for heater resistance soldering are laminated on a polyimide substrate (1). On the surface of the polyimide substrate, an Nb thin film detecting coil (4) is formed by sputtering, and a SQUID chip (5) is mounted. These are connected by superconducting bonding (6) and Al bonding (7). The following effects are obtained: The sensor endures sputtering process, there is no damage due to a thermal cycle, the sensor is prevented from being cracked owing to a difference of thermal expansion between a molding material and the polyimide substrate (1), an external connection cable can be connected by soldering, and heater resistance can be mounted by soldering.
- 学校法人金沢工業大学 産学連携局 研究支援推進部
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