|発明の名称||ELECTRON PERMEABLE FILM, AND METHOD FOR MANUFACTURING THE SAME|
PROBLEM TO BE SOLVED: To provide an electron permeable film of an amorphous electron permeable film having durability, with which a biological sample in the atmosphere can be observed by an electron microscope or the like, using a lower acceleration voltage.
SOLUTION: The electron permeable film is formed into a thin film made of a material containing carbon as a light element, focusing attention on a property of a material containing the light element that is a light element lighter than titanium and silicon of elements used conventionally as a material for the electron permeable film, so as to provide an amorphous thin film containing carbon as a main component, preferably an amorphous carbon thin film, and a shape of the electron permeable film is formed into a planar or a convex shape. Thus, the electron permeable film to be permeated with an electrons without being permeated with air, from a vacuum casing installed with an electron beam source for generating the electrons for irradiating the biological sample laid fixedly in the air, in the electron microscope or the like, and having the durability against an atmospheric pressure difference and biocompatibility onto a human body, and the electron permeable film usable with the lower acceleration voltage to compactify the electron beam source, are achieved.
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