|発明の名称||FOREIGN MATTER DETECTION DEVICE AND FOREIGN MATTER DETECTION METHOD|
PROBLEM TO BE SOLVED: To provide a foreign matter detection device and a foreign matter detection method capable of properly detecting a foreign matter mixed into a particle group including particles.
SOLUTION: A foreign matter detection device 3 detects the presence or absence of a foreign matter F in a particle group P including the large number of particles mounted on an upper surface 6a1 of a conveyance part 6a to be conveyed. The foreign matter detection device 3 includes an electromagnetic wave irradiation part 10 for irradiating an electromagnetic wave having a wavelength equal to or longer than an average particle size of the particle toward the particle group P from above the conveyance part 6a; a detection part 11 arranged below the conveyance part 6a and detecting the electromagnetic wave having passed the particle group P and the conveyance part 6a; and a control part 12 as a determination part for determining the presence or absence of the foreign matter F in the particle group P on the basis of a change appeared in the output of the detection part 11 during the conveyance of the particle group P. The detection part 11 includes a detection element 16 which is a detection element capable of detecting the electromagnetic wave, and is set to a value in which a distance between a detection surface 16a of the detection element 16 and the upper surface 6a1 of the conveyance part 6a is equal to or shorter than the wavelength of the electromagnetic wave irradiated by the electromagnetic wave irradiation part 10.
- 国立大学法人京都大学 産官学連携本部
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