|発明の名称||DIAGNOSTIC METHOD FOR SYNCHRONIZATION ACCURACY OF ROTATING BIAXIAL MOTION|
PROBLEM TO BE SOLVED: To provide a method by which a synchronization accuracy of rotating biaxial motion can be easily and quantitatively diagnosed at a low cost.
SOLUTION: A plate is rotationally moved around one of two axes orthogonal to each other at an angle which is given at an amplitude of a first sinusoidal function so that a sphere draws a trajectory of a Lissajous figure which has one or plural cross points on a plate surface. Simultaneously, the plate is rotationally moved around the other axis at an angle which given at an amplitude of a second sinusoidal function. Based on a deviation between a reference Lissajous figure obtained by a simulation such that rotational movements around two axes are accurately synchronized and respective cross points of two axes and a Lissajous figure drawn on the plate surface and respective cross points of two axes, and a deviation between the cross point of the reference Lissajous figure and a corresponding cross point of the Lissajous figure drawn on the plate surface, an amplitude and a synchronization error of a phase difference of the rotational movements around two axes are respectively quantitatively detected, thereby diagnosing a synchronization accuracy of rotational movements around two axes.
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