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* Published Japanese patents only


Hits 20 results

No. Application number
Gazette No
Title
Release Date
Update Date
Information Provider
1 P2009-190533 P5544789 METHOD FOR MANUFACTURING ENDLESS PATTERN, METHOD FOR MANUFACTURING RESIN PATTERN MOLDING, ENDLESS MOLD, AND OPTICAL ELEMENT commons meetings Sep 23, 2016 Jan 29, 2018 Tokyo University of Science
2 P2009-086680 P5267945 THREE-DIMENSIONAL MICROFABRICATION METHOD AND THREE-DIMENSIONAL MICROSTRUCTURE Aug 5, 2013 Jan 22, 2018 Kwansei Gakuin University
3 P2010-222493 P5754699 LIGHT SOURCE DEVICE FOR SEMICONDUCTOR LITHOGRAPHY commons meetings achieved foreign Jul 26, 2012 Jan 17, 2018 Kansai University
4 P2005-115261 P4590634 IMAGE FORMING METHOD BY REACTION DEVELOPMENT commons Aug 18, 2011 Feb 28, 2018 Yokohama National University
5 P2007-122964 P5110507 IMAGE FORMING METHOD THROUGH REACTION DEVELOPMENT commons Aug 18, 2011 Feb 16, 2018 Yokohama National University
6 P2007-073891 P5055549 LIQUID IMMERSION LITHOGRAPHY APPARATUS commons Aug 18, 2011 Feb 16, 2018 UTSUNOMIYA UNIVERSITY
7 P2006-543078 P3950981 (In Japanese) 高解像度パターン転写方法 commons foreign Aug 18, 2011 Feb 21, 2018 Tokyo Institute of Technology
8 P2010-021638 P5288498 OPTICAL PROCESSING DEVICE AND OPTICAL PROCESSING METHOD commons Jul 14, 2011 Jan 15, 2018 Japan Science and Technology Agency
9 P2010-042667 P5480666 PHOTOSENSITIVE RESIN COMPOSITION, THIN FILM THEREOF AND PATTERN FORMING METHOD Jun 7, 2011 Jan 12, 2018 Japan Science and Technology Agency
10 P2009-038631 P5408649 METHOD OF PRODUCING ENDLESS PATTERN, METHOD OF MANUFACTURING RESIN PATTERN MOLDING, ENDLESS MOLDING, RESIN PATTERN MOLDING, AND OPTICAL ELEMENT meetings Jul 2, 2010 Jan 29, 2018 Tokyo University of Science
11 P2004-290842 P4599553 LASER PROCESSING METHOD AND APPARATUS Jun 18, 2010 Mar 13, 2018 Hokkaido University
12 P2007-554839 P5067757 (In Japanese) 内面露光装置および内面露光方法 foreign Jan 12, 2010 Feb 16, 2018 Tokyo Denki University
13 P2009-141221 P5574470 EXTREME ULTRAVIOLET LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT GENERATING METHOD meetings Jul 10, 2009 Jan 29, 2018 University of Miyazaki
14 P2003-064586 P3950967 METHOD FOR FORMING SOLID COMPOUND FILM CONTAINING Si-O-Si BOND, MODIFICATION METHOD OF SOLID COMPOUND FILM INTO SILICON OXIDE, METHOD FOR FORMING PATTERN, AND LITHOGRAPHIC RESIST Dec 19, 2008 Mar 14, 2018 Japan Defense Agency
15 P2005-211948 P4487069 OPTICAL PATTERNING MATERIAL AND OPTICAL PATTERN FORMING METHOD commons meetings Oct 31, 2008 Feb 27, 2018 Chiba University
16 P2006-093877 P4631059 PHOTOACID GENERATING MATERIAL, AND PHOTOLITHOGRAPHIC MATERIAL, PHOTO-PATTERNING METHOD OR PHOTOLITHOGRAPHY USING THE SAME commons meetings Oct 31, 2008 Feb 21, 2018 Chiba University
17 P2007-037073 P5190860 PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD foreign Aug 1, 2008 Feb 16, 2018 Tokyo Denki University
18 P2001-377075 P4042893 MACHINING METHOD OF Si SEMICONDUCTOR FINE STRUCTURE DUE TO ION BEAM IMPLANTATION LITHOGRAPHY OF INORGANIC MULTILAYER RESIST AND INTEGRATED CIRCUIT, DEVICE, AND MICROMACHINE COMPONENT THEREBY achieved Jun 13, 2008 Apr 19, 2019 Kwansei Gakuin University
19 P2004-342700 P4517147 EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS Jun 23, 2006 Mar 13, 2018 University of Miyazaki
20 P2003-018997 P3668779 OPTICAL WAVEGUIDE DEVICE Jul 16, 2004 Mar 14, 2018 Gifu University

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