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* Published Japanese patents only


Hits 8 results

No. Application number
Gazette No
Title
Release Date
Update Date
Information Provider
1 P2004-343294 P4636862 GAS CLUSTER ION BEAM IRRADIATION APPARATUS Nov 21, 2018 Nov 21, 2018 Kyoto University
2 P2017-036566 P2018-142471A MARKING METHOD, MARKING DEVICE, AND MARKED ARTICLE meetings Nov 1, 2018 Jan 18, 2019 Gunma University
3 P2011-518362 P5634992 (In Japanese) イオンビーム照射装置及びイオンビーム発散抑制方法 Apr 15, 2015 Jan 17, 2018 Kyoto University
4 P2006-162394 P4514157 ION BEAM RADIATOR AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE foreign Aug 8, 2014 Feb 20, 2018 Kyoto University
5 P2006-550760 P4956746 (In Japanese) 荷電粒子発生装置及び加速器 achieved foreign Nov 19, 2012 Feb 22, 2018 Kyoto Institute of Technology
6 P2010-217084 P5442572 CHARGED PARTICLE BEAM DEVICE, THIN FILM FORMING METHOD, DEFECT CORRECTING METHOD, AND DEVICE MANUFACTURING METHOD Apr 17, 2012 Jan 16, 2018 Japan Science and Technology Agency
7 P2007-516201 P4945763 (In Japanese) 電子ビーム露光装置 May 15, 2009 Feb 19, 2018 Kyoto University
8 P2004-294599 P4534055 ION SOURCE Jan 18, 2008 Jul 19, 2019 Kanazawa Institute of Technology

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