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* Published Japanese patents only

Hits 29 results

No. Application number
▲▼		 Gazette No
▲▼		 Title
▲▼		 Release Date
▲▼		 Update Date
▲▼		 Information Provider
▲▼
1 P2017-222951 P2019-096673A (In Japanese) パターンの製造方法および半導体装置の製造方法 Jul 25, 2019 Jul 25, 2019 Hokkaido University
2 P2017-512594 P6370996 CROSSLINKED POLYMER STRUCTURE AND USE FOR SAME commons foreign Sep 19, 2018 Sep 19, 2018 Advanced Industrial Science and Technology
3 P2015-534251 P6443992 (In Japanese) 洗浄装置および洗浄方法 Jun 26, 2017 Jan 21, 2019 University of Tsukuba
4 P2014-525216 P5689207 (In Japanese) ナノインプリント用樹脂組成物、ナノインプリント基板、及びナノインプリント基板の製造方法 meetings Jun 23, 2017 Dec 18, 2017 Japan Science and Technology Agency
5 P2015-095977 P2016-213328A RESIST PEELING METHOD AND PEELING DEVICE UPDATE_EN Jan 19, 2017 Sep 30, 2019 OSAKA CITY UNIVERSITY
6 P2009-190533 P5544789 METHOD FOR MANUFACTURING ENDLESS PATTERN, METHOD FOR MANUFACTURING RESIN PATTERN MOLDING, ENDLESS MOLD, AND OPTICAL ELEMENT commons meetings Sep 23, 2016 Jan 29, 2018 Tokyo University of Science
7 P2006-242182 P5061269 MOLDING STAMPER AND MOLDING APPARATUS Oct 16, 2015 Feb 20, 2018 Kyoto University
8 P2013-125074 P6153110 ONE-COMPONENT ULTRALOW-TEMPERATURE MICRO SOLID PARTICLE CONTINUOUS GENERATION DEVICE, AND ONE-COMPONENT ULTRALOW-TEMPERATURE MICRO SOLID PARTICLE CONTINUOUS GENERATION METHOD meetings Mar 6, 2015 Dec 19, 2017 TOHOKU UNIVERSITY
9 P2014-217379 P6450561 IMAGING PATTERN SIMULATION SYSTEM, IMAGING PATTERN SIMULATION METHOD, IMAGING PATTERN SIMULATION PROGRAM AND RECORDING MEDIUM RECORDING THIS PROGRAM Feb 9, 2015 Jan 18, 2019 National University Corporation Kitami Institute of Technology
10 P2010-222493 P5754699 LIGHT SOURCE DEVICE FOR SEMICONDUCTOR LITHOGRAPHY commons meetings achieved foreign Jul 26, 2012 Jan 17, 2018 Kansai University
11 P2010-064194 P5665169 MOLD MANUFACTURING METHOD AND MOLD PRODUCED BY THE METHOD Jun 22, 2012 Jan 16, 2018 Waseda University
12 P2010-107764 P5198506 METHOD OF MANUFACTURING FUNCTIONAL DEVICE, THIN-FILM TRANSISTOR, AND PIEZOELECTRIC INKJET HEAD Nov 28, 2011 Jan 15, 2018 Japan Science and Technology Agency
13 P2005-035508 P4538631 IMAGE FORMING METHOD BY REACTION DEVELOPMENT commons Aug 18, 2011 Feb 28, 2018 Yokohama National University
14 P2005-115261 P4590634 IMAGE FORMING METHOD BY REACTION DEVELOPMENT commons Aug 18, 2011 Feb 28, 2018 Yokohama National University
15 P2007-122964 P5110507 IMAGE FORMING METHOD THROUGH REACTION DEVELOPMENT commons Aug 18, 2011 Feb 16, 2018 Yokohama National University
16 P2007-073891 P5055549 LIQUID IMMERSION LITHOGRAPHY APPARATUS commons Aug 18, 2011 Feb 16, 2018 UTSUNOMIYA UNIVERSITY
17 P2006-543078 P3950981 (In Japanese) 高解像度パターン転写方法 commons foreign Aug 18, 2011 Feb 21, 2018 Tokyo Institute of Technology
18 P2010-021638 P5288498 OPTICAL PROCESSING DEVICE AND OPTICAL PROCESSING METHOD commons Jul 14, 2011 Jan 15, 2018 Japan Science and Technology Agency
19 P2010-042667 P5480666 PHOTOSENSITIVE RESIN COMPOSITION, THIN FILM THEREOF AND PATTERN FORMING METHOD Jun 7, 2011 Jan 12, 2018 Japan Science and Technology Agency
20 P2009-038631 P5408649 METHOD OF PRODUCING ENDLESS PATTERN, METHOD OF MANUFACTURING RESIN PATTERN MOLDING, ENDLESS MOLDING, RESIN PATTERN MOLDING, AND OPTICAL ELEMENT meetings Jul 2, 2010 Jan 29, 2018 Tokyo University of Science
21 P2007-542331 P4876261 (In Japanese) パターニングされた物質の製造方法 Jan 22, 2010 Feb 16, 2018 Hokkaido University
22 P2009-141221 P5574470 EXTREME ULTRAVIOLET LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT GENERATING METHOD meetings Jul 10, 2009 Jan 29, 2018 University of Miyazaki
23 P2003-064586 P3950967 METHOD FOR FORMING SOLID COMPOUND FILM CONTAINING Si-O-Si BOND, MODIFICATION METHOD OF SOLID COMPOUND FILM INTO SILICON OXIDE, METHOD FOR FORMING PATTERN, AND LITHOGRAPHIC RESIST Dec 19, 2008 Mar 14, 2018 Japan Defense Agency
24 P2005-211948 P4487069 OPTICAL PATTERNING MATERIAL AND OPTICAL PATTERN FORMING METHOD commons meetings Oct 31, 2008 Feb 27, 2018 Chiba University
25 P2006-093877 P4631059 PHOTOACID GENERATING MATERIAL, AND PHOTOLITHOGRAPHIC MATERIAL, PHOTO-PATTERNING METHOD OR PHOTOLITHOGRAPHY USING THE SAME commons meetings Oct 31, 2008 Feb 21, 2018 Chiba University
26 P2007-037073 P5190860 PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD foreign Aug 1, 2008 Feb 16, 2018 Tokyo Denki University
27 P2005-040478 P4825966 COARSE/FINE POSITIONING DEVICE commons meetings Nov 17, 2006 Mar 2, 2018 UTSUNOMIYA UNIVERSITY
28 P2004-342700 P4517147 EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS Jun 23, 2006 Mar 13, 2018 University of Miyazaki
29 P2003-018997 P3668779 OPTICAL WAVEGUIDE DEVICE Jul 16, 2004 Mar 14, 2018 Gifu University

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