Top > Search of Japanese Patents

Search of Japanese Patents

Patent state	Patent unpublished to the public Patent published to the public

Information provider

Applicant

IPC

F-term

5F046 Exposure of semiconductors to light (i.e., excluding electron beams and ion beams)

Specify icons

meetings

achieved

foreign

Select data

	All data ( 9,713 )
	In the last 1 month ( 14 )
	Modified data in the last 1 month
	Specify entry month/Year		～
	Specify Date of filing		～

Specify number

Application number Publication number Patent number

Display option

Order by Display image

* Published Japanese patents only

Hits 17 results

No.	Application number ▲▼	Gazette No ▲▼	Title ▲▼	Release Date ▲▼	Update Date ▲▼	Information Provider ▲▼
1	P2005-040478	P4825966	COARSE/FINE POSITIONING DEVICE	Nov 17, 2006	Mar 2, 2018	UTSUNOMIYA UNIVERSITY
2	P2009-141221	P5574470	EXTREME ULTRAVIOLET LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT GENERATING METHOD	Jul 10, 2009	Jan 29, 2018	University of Miyazaki
3	P2004-342700	P4517147	EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS	Jun 23, 2006	Mar 13, 2018	University of Miyazaki
4	P2005-035508	P4538631	IMAGE FORMING METHOD BY REACTION DEVELOPMENT	Aug 18, 2011	Feb 28, 2018	Yokohama National University
5	P2007-073891	P5055549	LIQUID IMMERSION LITHOGRAPHY APPARATUS	Aug 18, 2011	Feb 16, 2018	UTSUNOMIYA UNIVERSITY
6	P2003-064586	P3950967	METHOD FOR FORMING SOLID COMPOUND FILM CONTAINING Si-O-Si BOND, MODIFICATION METHOD OF SOLID COMPOUND FILM INTO SILICON OXIDE, METHOD FOR FORMING PATTERN, AND LITHOGRAPHIC RESIST	Dec 19, 2008	Mar 14, 2018	Japan Defense Agency
7	P2009-190533	P5544789	METHOD FOR MANUFACTURING ENDLESS PATTERN, METHOD FOR MANUFACTURING RESIN PATTERN MOLDING, ENDLESS MOLD, AND OPTICAL ELEMENT	Sep 23, 2016	Jan 29, 2018	Tokyo University of Science
8	P2010-107764	P5198506	METHOD OF MANUFACTURING FUNCTIONAL DEVICE, THIN-FILM TRANSISTOR, AND PIEZOELECTRIC INKJET HEAD	Nov 28, 2011	Jan 15, 2018	Japan Science and Technology Agency
9	P2010-064194	P5665169	MOLD MANUFACTURING METHOD AND MOLD PRODUCED BY THE METHOD	Jun 22, 2012	Jan 16, 2018	Waseda University
10	P2006-242182	P5061269	MOLDING STAMPER AND MOLDING APPARATUS	Oct 16, 2015	Feb 20, 2018	Kyoto University
11	P2005-211948	P4487069	OPTICAL PATTERNING MATERIAL AND OPTICAL PATTERN FORMING METHOD	Oct 31, 2008	Feb 27, 2018	Chiba University
12	P2010-021638	P5288498	OPTICAL PROCESSING DEVICE AND OPTICAL PROCESSING METHOD	Jul 14, 2011	Jan 15, 2018	Japan Science and Technology Agency
13	P2003-018997	P3668779	OPTICAL WAVEGUIDE DEVICE	Jul 16, 2004	Nov 30, 2020	Gifu University
14	P2006-093877	P4631059	PHOTOACID GENERATING MATERIAL, AND PHOTOLITHOGRAPHIC MATERIAL, PHOTO-PATTERNING METHOD OR PHOTOLITHOGRAPHY USING THE SAME	Oct 31, 2008	Feb 21, 2018	Chiba University
15	P2007-037073	P5190860	PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD	Aug 1, 2008	Feb 16, 2018	Tokyo Denki University
16	P2007-542331	P4876261	(In Japanese) パターニングされた物質の製造方法	Jan 22, 2010	Feb 16, 2018	Hokkaido University
17	P2006-543078	P3950981	(In Japanese) 高解像度パターン転写方法	Aug 18, 2011	Feb 21, 2018	Tokyo Institute of Technology